High frequency probe card for probing photoelectric device
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United States of America Patent
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Jan 3, 2017
Grant Date -
Jan 29, 2015
app pub date -
Jul 23, 2014
filing date -
Jul 23, 2013
priority date (Note) -
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Abstract
A high frequency probe card for probing a photoelectric device includes a substrate having a first opening and at least one first through hole, an interposing plate disposed on the substrate and having a second opening and at least one second through hole, a circuit board disposed on the interposing plate and having a third opening and at least one third through hole, and a probe module mounted to the substrate and having at least one ground probe and at least one high-frequency impedance matching probe having a signal transmitting structure and a grounding structure passing through the at least one first, second and third through holes and being electrically connected with a signal pad and a ground pad of the circuit board, respectively. The first, second and third openings are communicated with each other for light transmission.
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