Interface of a microfabricated scanning force sensor for combined force and position sensing
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United States of America Patent
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Jan 3, 2017
Grant Date -
Dec 24, 2015
app pub date -
Jun 17, 2015
filing date -
Jun 24, 2014
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Abstract
A micro fabricated sensor for micro-mechanical and nano-mechanical testing and nano-indentation. The sensor includes a force sensing capacitive comb drive for the sensing of a force applied to a sample, a position sensing capacitive comb drive for the sensing of the position of a sample and a micro fabricated actuator to apply a load to the sample. All the sensor components mentioned above are monolithically integrated on the same silicon MEMS chip.
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