Vapour deposition process for the preparation of a phosphate compound
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United States of America Patent
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Jan 3, 2017
Grant Date -
Sep 25, 2014
app pub date -
Jul 20, 2012
filing date -
Jul 21, 2011
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Abstract
The present invention provides a vapour deposition process for the preparation of a phosphate compound, wherein the process comprises providing each component element of the phosphate compound as a vapour, and co-depositing the component element vapours on a common substrate, wherein the component elements react on the substrate to form the phosphate compound.
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