Charged particle beam system and method of operating a charged particle beam system
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United States of America Patent
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Dec 27, 2016
Grant Date -
Jan 8, 2015
app pub date -
Jun 25, 2014
filing date -
Jul 8, 2013
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Abstract
The present disclosure relates to a charged particle beam system comprising a charged particle beam source, a charged particle column, a sample chamber, a plurality of electrically powered devices arranged within or at either one of the charged particle column, the charged particle beam source and the sample chamber, and at least one first converter to convert an electrical AC voltage power into an electrical DC voltage. The first converter is positioned at a distance from either of the charged particle beam source, the charged particle column and the charged particle chamber, and all elements of the plurality of electrically powered devices, when operated during operation of the charged particle beam source, are configured to be exclusively powered by the DC voltage provided by the converter.
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