Charged particle beam system and method of operating a charged particle beam system
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United States of America Patent
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Dec 27, 2016
Grant Date -
Jan 8, 2015
app pub date -
Jun 25, 2014
filing date -
Jul 8, 2013
priority date (Note) -
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Abstract
The present disclosure relates to a charged particle beam system, comprising a noble gas field ion beam source, a charged particle beam column, and a housing defining a first vacuum region and a second vacuum region. A noble gas field ion beam source is arranged within the first vacuum region. A first mechanical vacuum pump is functionally attached to the first vacuum region, an ion getter pump is attached to the charged particle beam column, and a gas supply is attached to the first vacuum region configured to supply a noble gas to the noble gas field ion beam source.
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