Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams
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United States of America Patent
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Dec 27, 2016
Grant Date -
Jun 2, 2016
app pub date -
Nov 30, 2015
filing date -
Dec 2, 2014
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Abstract
A method for fabricating a blanking aperture array device for multi-beams includes forming, using a substrate over which a first insulating film, a first metal film, a second insulating film, and a second metal film are laminated in order, electrodes and pads on the second metal film, removing a part of the second metal film, removing the second insulating film using, as a mask, the electrodes, the pads, and a remaining part of the second metal film, and forming openings each being between a pair of electrodes, wherein, a part of the second metal film is etched such that some part of it remains in regions each connecting one of the electrodes and one of the pads, and a region in which entire openings are formed except the openings themselves is configured by the electrodes, pads, and first and second metal films such that the insulating film is not exposed.
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