Chucking system with recessed support feature
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Dec 27, 2016
Grant Date -
Apr 2, 2015
app pub date -
Dec 15, 2014
filing date -
Jul 2, 2009
priority date (Note) -
In Force
status (Latency Note)
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Abstract
In an imprint lithography system, a recessed support on a template chuck may alter a shape of a template positioned thereon providing minimization and/or elimination of premature downward deflection of outer edges of the template in a nano imprint lithography process.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
CITIBANK N A | 388 GREENWICH STREET NEW YORK NY 10013 |
International Classification(s)

- 2014 Application Filing Year
- B82Y Class
- 1019 Applications Filed
- 1006 Patents Issued To-Date
- 98.73 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Choi, Byung-Jin | Austin, US | 194 | 2163 |
# of filed Patents : 194 Total Citations : 2163 | |||
GanapathiSubramanian, Mahadevan | Cupertino, US | 18 | 268 |
# of filed Patents : 18 Total Citations : 268 | |||
Meissl, Mario Johannes | Austin, US | 38 | 151 |
# of filed Patents : 38 Total Citations : 151 | |||
Panga, Avinash | San Jose, US | 10 | 69 |
# of filed Patents : 10 Total Citations : 69 |
Cited Art Landscape
- No Cited Art to Display

Patent Citation Ranking
- 5 Citation Count
- B82Y Class
- 0 % this patent is cited more than
- 9 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jun 27, 2028 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
Date | Code | Event | Description |
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Jun 29, 2020 | MAFP | MAINTENANCE FEE PAYMENT | free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 4 |
Nov 06, 2019 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF SECURITY INTEREST IN PATENTS;ASSIGNOR:JPMORGAN CHASE BANK, N.A.;REEL/FRAME:050967/0138 Owner name: CITIBANK, N.A., NEW YORK Effective Date: Nov 06, 2019 |
Aug 20, 2019 | AS� | SECURITY INTEREST | free format text: PATENT SECURITY AGREEMENT;ASSIGNORS:MAGIC LEAP, INC.;MOLECULAR IMPRINTS, INC.;MENTOR ACQUISITION ONE, LLC;REEL/FRAME:050138/0287 Owner name: JP MORGAN CHASE BANK, N.A., NEW YORK Effective Date: Aug 20, 2019 |
Dec 27, 2016 | I | Issuance | |
Dec 07, 2016 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Aug 19, 2016 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:GANAPATHISUBRAMANIAN, MAHADEVAN;MEISSL, MARIO JOHANNES;PANGA, AVINASH;AND OTHERS;REEL/FRAME:039484/0777 Owner name: CANON NANOTECHNOLOGIES, INC., TEXAS Effective Date: Jul 21, 2010 free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:CANON NANOTECHNOLOGIES, INC.;REEL/FRAME:039485/0001 Owner name: MOLECULAR IMPRINTS, INC., TEXAS Effective Date: Aug 19, 2016 |
Apr 02, 2015 | P | Published | |
Dec 15, 2014 | F | Filing | |
Jul 17, 2014 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:GANAPATHISUBRAMANIAN, MAHADEVAN;MEISSL, MARIO JOHANNES;PANGA, AVINASH;AND OTHERS;REEL/FRAME:040961/0738 Owner name: MOLECULAR IMPRINTS, INC., TEXAS Effective Date: Jul 21, 2010 free format text: CHANGE OF NAME;ASSIGNOR:MOLECULAR IMPRINTS, INC.;REEL/FRAME:040962/0028 Owner name: CANON NANOTECHNOLOGIES, INC., TEXAS Effective Date: Jul 17, 2014 |

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