Closed loop controller and method for fast scanning probe microscopy
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United States of America Patent
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Dec 20, 2016
Grant Date -
Sep 15, 2016
app pub date -
Jan 26, 2016
filing date -
May 7, 2007
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Abstract
A method of operating a metrology instrument includes generating relative motion between a probe and a sample at a scan frequency using an actuator. The method also includes detecting motion of the actuator using a position sensor that exhibits noise in the detected motion, and controlling the position of the actuator using a feedback loop and a feed forward algorithm. In this embodiment, the controlling step attenuates noise in the actuator position compared to noise exhibited by the position sensor in a bandwidth of about seven times the scan frequency. Scan frequencies up to a third of the first scanner resonance frequency or greater than 300 Hz are possible.
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