Capacitor-referenced temperature sensing

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United States of America Patent

PATENT NO 9523615
SERIAL NO

14927864

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Abstract

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The temperature-dependent resistance of a MEMS structure is compared with an effective resistance of a switched CMOS capacitive element to implement a high performance temperature sensor.

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Patent Owner(s)

Patent OwnerAddress
SITIME CORPORATION5451 PATRICK HENRY DRIVE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Shungneng Sunnyvale, US 48 349
Perrott, Michael H Nashua, US 60 1726

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