Mass transfer tool manipulator assembly with remote center of compliance
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United States of America Patent
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Dec 20, 2016
Grant Date -
Nov 12, 2015
app pub date -
May 8, 2014
filing date -
May 8, 2014
priority date (Note) -
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Abstract
Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.
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