Ion implantation apparatus
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United States of America Patent
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Dec 13, 2016
Grant Date -
Jun 4, 2015
app pub date -
Dec 2, 2014
filing date -
Dec 2, 2013
priority date (Note) -
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Abstract
A multistage quadrupole lens system in an ion implantation apparatus includes a first quadrupole lens and a third quadrupole lens. A first bore radius of the first quadrupole lens may be smaller than a third bore radius of the third quadrupole lens. The multistage quadrupole lens system may further include a second quadrupole lens placed between the first quadrupole lens and the third quadrupole lens. A second bore radius of the second quadrupole lens may take a value lying between the first bore radius of the first quadrupole lens and the third bore radius of the third quadrupole lens (i.e., an intermediate value between them).
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