Scanning mechanism and scanning probe microscope
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 13, 2016
Grant Date -
Jan 14, 2016
app pub date -
Sep 23, 2015
filing date -
Apr 4, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully