Dual beam splitter interferometer measuring 3 degrees of freedom, system and method of use
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United States of America Patent
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Dec 13, 2016
Grant Date -
Apr 16, 2015
app pub date -
Nov 29, 2012
filing date -
Dec 1, 2011
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Abstract
A compact, balanced, up to three degrees of freedom measuring interferometer having dual beam splitters rotated ninety degrees with respect to each other and a measurement detector including a quadrant detector or multi-core fiber with four detectors which enables fiber delivery of an optical source without periodic error, an interferometer system, and method for using is disclosed.
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