Variable radius mirror dichroic beam splitter module for extreme ultraviolet source
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United States of America Patent
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Dec 6, 2016
Grant Date -
Jun 16, 2016
app pub date -
Jul 21, 2015
filing date -
Dec 16, 2014
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Abstract
A laser produced plasma extreme ultraviolet laser source comprising at least one variable radius mirror. The at least one variable radius mirror to adjust a beam diameter of a main pulse at a specified distance from a pre-pulse focal plane, where the pre-pulse radiates droplets into target droplets and the main pulse radiates the target droplets into a plasma state to generate the extreme ultraviolet radiation.
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