Membrane-based nano-electromechanical systems device and methods to make and use same
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United States of America Patent
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Dec 6, 2016
Grant Date -
Jun 25, 2015
app pub date -
Jun 19, 2013
filing date -
Jun 19, 2012
priority date (Note) -
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Abstract
Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions.
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International Classification(s)
- B82Y:SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; ....
- H02N:ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- B81B:MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-ME....
- H01H:ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PR....
- H01G:CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWI....
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