Gas laser device
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United States of America Patent
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Dec 6, 2016
Grant Date -
May 12, 2016
app pub date -
Dec 27, 2013
filing date -
Dec 27, 2013
priority date (Note) -
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Abstract
A gas laser device which can perform optical amplification, laser light passing through a laser gas excited by electrical discharge, including: a first and second pair of discharge electrodes arranged longitudinally along an optical axis of the laser light; at least two mirrors reflecting the laser light amplified by the gas laser, the mirrors arranged opposite to each other to interpose a first discharge region defined by the first pair of discharge electrodes and a second discharge region defined by the second pair of discharge electrodes therebetween; and a shielding member located between the first pair of discharge electrodes and the second pair of discharge electrodes, the shielding member protruding from electrode surfaces of the discharge electrodes toward the optical axis of the laser light. The configuration can efficiently suppress parasitic oscillation with a simple structure.
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