Spectroscopic measurement device
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United States of America Patent
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Dec 6, 2016
Grant Date -
Sep 17, 2015
app pub date -
Sep 25, 2013
filing date -
Oct 1, 2012
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Abstract
A spectroscopic measurement device includes a dark filter that is arranged on an optical path between an imaging optical system and a light detection unit and includes a plurality of regions having different transmittances, the filter being configured such that a fixed reflected measurement light and a movable reflected measurement light that are guided to a same point by the imaging optical system and form interference light are transmitted through a same region; and an arithmetic processing unit that obtains an interferogram of the measurement light at a transmittance corresponding to each of two or more regions from a detection signal of each pixel of a light detection unit when a movable reflection unit is moved, and obtains a spectrum of the measurement light based on the interferogram.
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