Cooling water jet pack for high power rotary cathodes
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United States of America Patent
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Dec 6, 2016
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N/A
app pub date -
Sep 23, 2010
filing date -
Sep 24, 2009
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Abstract
A sputtering target assembly, including a cylindrical backing tube, a magnet assembly disposed within the backing tube, and a conduit disposed within the backing tube and adapted for transporting coolant. The conduit includes at least one first opening positioned for providing the coolant in a substantially circumferential direction from the conduit toward an inner surface of the backing tube into a gap volume between a front side of the magnet assembly and the inner surface of the backing tube.
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