Acoustic wave device and electronic apparatus including same
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United States of America Patent
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Nov 15, 2016
Grant Date -
Aug 21, 2014
app pub date -
Feb 10, 2014
filing date -
Feb 15, 2013
priority date (Note) -
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Abstract
An acoustic wave device includes a piezoelectric substrate, an IDT electrode including plural electrode fingers disposed above an upper surface of the piezoelectric substrate, a first dielectric film made of oxide disposed above the upper surface of the substrate for covering the electrode fingers, and a second dielectric film made of non-oxide disposed on upper surfaces of the electrode fingers and between the first dielectric film and each of the electrode fingers. The first dielectric film contacts the upper surface of the piezoelectric substrate at a position between electrode fingers out of the plural electrode fingers adjacent to each other. The acoustic wave device prevents the electrode fingers of the IDT electrode from corrosion.
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