Etching technique for microfabrication substrates

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United States of America Patent

PATENT NO 9493877
SERIAL NO

15144735

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Abstract

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A method for creating small features in an Al/Ag/Ti multilayer stack is disclosed. The method uses a combination of wet and dry etching techniques to anisotropically etch the layers.

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Patent Owner(s)

Patent OwnerAddress
INNOVATIVE MICRO TECHNOLOGYGOLETA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gilbert, Tao Goleta, US 3 26
Harley, John Santa Barbara, US 12 28
Summers, Jeffery F Santa Barbara, US 29 263

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