Processes and systems for non-equilibrium trichlorosilane production
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United States of America Patent
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Nov 15, 2016
Grant Date -
Oct 30, 2014
app pub date -
Nov 10, 2012
filing date -
Nov 14, 2011
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Abstract
A catalytic process for converting silicon tetrachloride (STC) into trichlorosilane (TCS) utilizes a metal catalyst such as metal silicide at a low temperature such as 500 C, where the STC is reacted with hydrogen gas in the presence of catalyst and under non-thermal equilibrium conditions, to provide for a product gas stream that includes TCS at levels exceeding those obtained at thermal equilibrium, as well as optionally including HCl and unreacted STC.
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