Vertical differential resonator
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 8, 2016
Grant Date -
N/A
app pub date -
Oct 14, 2014
filing date -
Sep 27, 2011
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A micromechanical device includes a substrate, a micromechanical structure supported by the substrate and configured for overtone resonant vibration relative to the substrate, and a plurality of electrodes supported by the substrate and spaced from the micromechanical structure by respective gaps. The plurality of electrodes include multiple drive electrodes configured relative to the micromechanical structure to excite the overtone resonant vibration with a differential excitation signal, or multiple sense electrodes configured relative to the micromechanical structure to generate a differential output from the overtone resonant vibration.
First Claim
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International Classification(s)
- 2014 Application Filing Year
- H03B Class
- 380 Applications Filed
- 341 Patents Issued To-Date
- 89.74 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H03B Class
- 0 % this patent is cited more than
- 9 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 8, 2028 |