Laser apparatus and method of controlling laser apparatus
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United States of America Patent
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Nov 8, 2016
Grant Date -
Jun 25, 2015
app pub date -
Mar 4, 2015
filing date -
Sep 7, 2012
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Abstract
A laser apparatus may comprise: a laser chamber configured to include a laser gain medium; a pair of electrodes disposed in the laser chamber; an energy detector configured to measure pulse energy of laser beams outputted by discharging between the pair of the electrodes; an optical element disposed on a light path of the laser beams; and a controller configured to calculate an integration value of absorption energy at the optical element, and determine whether the integration value exceeds a lifetime integration value of the optical element based on the pulse energy of the laser beams.
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