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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TOKAI CARBON CO LTD	2-3 KITA-AOYAMA 1-CHOME MINATO-KU TOKYO 107-8636

International Classification(s)

• B24B:MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR PO....
• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
• C30B:SINGLE-CRYSTAL GROWTH

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Fahey, James T	Mendon, US	16	212
Goela, Jitendra S	Andover, US	40	889
Pickering, Michael A	Dracut, US	34	635
Strickland, Melinda S	Hillsboro, US	2	15

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	May 8, 2028

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
November 08, 2016	US,9490157,B2   US9490157B2	GRANTED PATENT AS SECOND PUBLICATION
August 06, 2009	US,20090194022,A1   US20090194022A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9490157

Semiconductor processing

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