Active vibration isolation and damping system
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United States of America Patent
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Nov 8, 2016
Grant Date -
Jun 21, 2012
app pub date -
Jun 11, 2010
filing date -
Jun 12, 2009
priority date (Note) -
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Abstract
An active vibration isolation and damping system (11) comprising a payload (12) that has to be isolated or damped, a vibration sensor (14) for detecting a vibration of the payload, an actuator (15) for moving the payload relative to a bearing body (13) supporting the payload, and a controller (16) for providing the actuator with a signal that is representative for the vibration. The system provides a solution for the tilting problem by applying a vibration sensor that has a low stiffness connection to the payload (12) for rotation along an axis (17) perpendicular to the gravitational force (18), and a high stiffness connection to the payload (12) for the vibration detectable with the vibration sensor.
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