Metal-insulator-metal (MIM) capacitor
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United States of America Patent
Stats
-
Nov 1, 2016
Grant Date -
Feb 18, 2016
app pub date -
Oct 28, 2015
filing date -
Sep 21, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
There is disclosed a metal-insulator-metal, MIM, capacitor. The MIM capacitor comprises a MIM stack formed within an interconnect metal layer. The interconnect metal layer is utilized as an electrical connection to a metal layer of the MIM stack.
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International Classification(s)
- 2015 Application Filing Year
- H01L Class
- 25498 Applications Filed
- 22451 Patents Issued To-Date
- 88.06 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 9 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 1, 2028 |
