Temperature controller for semiconductor manufacturing equipment, method for calculating PID constants in semiconductor manufacturing, and method for operating temperature controller for semiconductor manufacturing equipment
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United States of America Patent
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Nov 1, 2016
Grant Date -
Jul 23, 2015
app pub date -
Jul 18, 2013
filing date -
Jul 25, 2012
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Abstract
A temperature adjustment system configured to adjust the temperature of a fluid used in a semiconductor manufacturing apparatus includes: a heat exchanger including therein a temperature adjuster for heating and cooling the fluid, the heat exchanger being configured to perform heat exchange between the fluid therein and the temperature adjuster; a temperature sensor configured to measure the temperature of the fluid; a PID-constant calculator configured to calculate PID constants for PID control based on the physical properties of the fluid and a time constant of the temperature sensor; and a PID-control calculator configured to perform the PID control on the temperature adjuster with the PID constants calculated by the PID-constant calculator.
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