Method of detecting arc discharge in a plasma process
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United States of America Patent
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Nov 1, 2016
Grant Date -
Nov 17, 2011
app pub date -
Jul 27, 2011
filing date -
Mar 25, 2004
priority date (Note) -
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Abstract
An arc discharge detection device is used for detecting arc discharges in a plasma process. The arc discharge detection device includes a comparator configured to emit an arc discharge detection signal and receive an instantaneous value of the signal or a signal proportional thereto, a minimum or maximum value detection device configured to receive the signal and to determine a minimum or maximum value of the signal within a predetermined time period, a setting means configured to receive the minimum or maximum value and to generate a reference signal from the minimum or maximum value, such that the reference signal is supplied to the comparator, and such that the comparator changes the signal level of the arc discharge detection signal when the comparator detects that the instantaneous value has reached the reference signal.
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