Scanning probe microscope
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Nov 1, 2016
Grant Date -
May 14, 2015
app pub date -
Jan 22, 2015
filing date -
Jul 23, 2012
priority date (Note) -
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Abstract
A scanning probe microscope to measure a sample set on a sample mount in liquid includes a scanning mechanism to scan a cantilever provided with a probe at a free end along an X-axis, a Y-axis, and a Z-axis perpendicular to each other, and a liquid contact member including an optical transmission portion to transmit detection light for detecting a displacement of the cantilever, and arranged at least partially in contact with the liquid. The liquid contact member is not scanned by the scanning mechanism.
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