Repeatable heat-treating methods and apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9482468
APP PUB NO 20070069161A1
SERIAL NO

11521074

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Abstract

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A first heat-treating method involves monitoring at least one thermal efficiency parameter associated with an irradiance system configured to produce an irradiance flash incident on a surface of a workpiece, and automatically updating control information used by the irradiance system to produce the irradiance flash, in response to the monitoring of the thermal efficiency parameter. A second method involves predicting a heating effect of an irradiance flash to be incident upon a surface of a workpiece, in response to a measurement of a heating parameter of the surface, and pre-adjusting the irradiance flash, in response to the predicted heating effect. A third method involves measuring a temperature of a surface of a workpiece during an initial portion of an irradiance flash incident on the surface, and controlling a power of a remaining portion of the irradiance flash, in response to the temperature.

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Patent Owner(s)

Patent OwnerAddress
MATTSON TECHNOLOGY INC47131 BAYSIDE PARKWAY FREMONT CA 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO LTDNO 8 BUILDING NO 28 JINGHAI ER RD ECONOMIC AND TECHNICAL DEVELOPMENT ZONE BEIJING 100176

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Camm, David Malcolm Vancouver, CA 20 466
Dets, Sergiy Richmond, CA 11 135
Kaludjercic, Ljubomir Vancouver, CA 3 62
McDonnell, Kevin Burnaby, CA 56 961
Rudic, Igor Vancouver, CA 3 56
Stuart, Greg Burnaby, CA 11 239
Thrum, Tilman Richmond, CA 3 56

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