High-resolution positioning device
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United States of America Patent
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Oct 25, 2016
Grant Date -
Mar 20, 2014
app pub date -
Apr 27, 2012
filing date -
Apr 29, 2011
priority date (Note) -
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Abstract
A high-resolution positioning device has a stator and a rotor, a coil array, arranged on the stator, and having at least three groups of flat coils, wherein each group has at least two single coils and the coil array encloses a free space on the stator, also having permanent magnetically-excited circuits that are situated on, against or in the rotor and form a magnet array which likewise encloses a free space, wherein the free spaces accommodate a position measuring system which has a measuring head having sensors, and an area scale. The device is in the form of a freely suspended, magnetically controlled six-dimensional drive, wherein the measuring head is situated in the coil array free space and the area scale is situated in the magnet array free space, and the rotor is free of drive-related electrical or electronic and, in this regard, live parts.
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