Optical property measurement apparatus and optical property measurement method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 25, 2016
Grant Date -
Nov 12, 2015
app pub date -
Dec 4, 2013
filing date -
Dec 13, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An apparatus enabling abnormality detection of a sample. A first interference optical system scans the sample with first signal light from a first sample optical path, making the first signal light interfere with first reference light from a first reference optical path, to detect first interference light. Optical path length difference between the first sample optical path and first reference optical path is changed based on the detection. A change in the optical path length difference is determined. A second interference optical system scans the sample with second signal light from a second sample optical path, making the second signal light interfere with second reference light from a second reference optical path to detect second interference light. Tomographic information of the sample based on detection of the second interference light is determined. A refractive index profile of the sample is obtained based on the change amount information and tomographic information.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2013 Application Filing Year
- G01N Class
- 9056 Applications Filed
- 7640 Patents Issued To-Date
- 84.37 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G01N Class
- 0 % this patent is cited more than
- 9 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Apr 25, 2028 |
