Adjustable shunt assembly for a sputtering magnetron and a method for adjusting such a shunt
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United States of America Patent
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Oct 25, 2016
Grant Date -
Jun 12, 2014
app pub date -
Nov 4, 2013
filing date -
Dec 10, 2012
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Abstract
An adjustable shunt assembly for use with a sputtering magnetron having at least two magnets spaced from one another and disposed with respect to a sputtering target having a sputtering surface. The magnets define a longitudinal axis and the adjustable shunt assembly moves a shunt between the two magnets for altering the magnetic field therebetween. A transporter is used for moving the shunt so that such movement may be occurred without disassembling the components of the magnetron and such movement may also be done remotely. A method for moving such shunts is also disclosed.
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