Polarization-modulating optical element
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United States of America Patent
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Feb 28, 2017
Grant Date -
Nov 7, 2013
app pub date -
Jul 2, 2013
filing date -
Jul 2, 2013
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Abstract
A microlithography optical system includes a projection objective and an illumination system that includes a temperature compensated polarization-modulating optical element. The temperature compensated polarization-modulating optical element includes a first polarization-modulating optical element of optically active material, the first polarization-modulating optical element having a first specific rotation with a sign. The temperature compensated polarization-modulating optical element includes also includes a second polarization-modulating optical element of optically active material, the second polarization-modulating optical element having a second specific rotation with a sign opposite to the sign of the first specific rotation.
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