Apparatus and method for atomic force probing/SEM nano-probing/scanning probe microscopy and collimated ion milling

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United States of America Patent

PATENT NO 9470712
SERIAL NO

14879645

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Abstract

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An apparatus and method for facilitating Atomic Force Microscopy, SEM Nano-Probing, Scanning Probe Microscopy, and Collimated Ion Milling, through the implementation of a removable, magnetized fixture for fixing the position of a sample requiring surface treatment, the fixture attachable to a holder requiring surface treatment, the holder being mountable in various instruments, the fixture being transportable in a container having a magnetized surface plate or disc for magnetic attachment of said fixture, with the container having a valve to permit alternative evacuation and backfill with an inert gas to protect the sample surface.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES INCMAPLES CORPORATE SERVICES LIMITED PO BOX 309 UGLAND HOUSE GRAND CAYMAN KY1-1104

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kane, Terence L Wappinger Falls, US 26 97
Marsin, Robert P Middletown, US 1 1
Nxumalo, Jochonia N Wappinger Falls, US 3 4
Stanton, Matthew F Salt Point, US 6 19

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