Micromechanical structure having a deformable membrane and a protection against strong deformations

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9470592
APP PUB NO 20140290375A1
SERIAL NO

14354113

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates to a micromechanical structure for measuring or detecting a mechanical quantity or a dynamic quantity, including a deformable membrane (20) and a supporting substrate (10), the membrane (20) including a first portion (20a) and a second portion (20b) surrounded by the first portion (20a), the second portion (20b) having a thickness that is less than the thickness of the first portion (20a), the membrane (20) being suspended above the supporting substrate (10) and thus defining a free space (30), said micromechanical structure comprising in addition a lower abutment (21) for limiting the deformations of the membrane (20), said lower abutment (21) being arranged above the supporting substrate (10) and extending into the free space (30) from said supporting substrate (10) toward the membrane (20), characterized in that the lower abutment (21) comprises islets (101-108) that extend into the free space (30) toward the membrane (20) from a flat surface of the lower abutment (21), the islets (101-108) forming a relief structure in such a manner that, in the case of contact between the islets (101-108) and the fine portion (20b) of the membrane (20), the contact surface between the islets (101-108) and the fine portion (20b) of the membrane (20) is small with respect to the dimensions of the fine portion (20b) of the membrane (20).

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Patent Owner(s)

Patent OwnerAddress
AUXITROL S A18000 BOURGES

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brida, Sebastiano Salles Sur L'Hers, FR 5 86

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