Method for manufacturing boundary acoustic wave device
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United States of America Patent
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Oct 11, 2016
Grant Date -
Jan 30, 2014
app pub date -
Sep 25, 2013
filing date -
Aug 27, 2010
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Abstract
A manufacturing method for a boundary acoustic wave device is capable of certainly providing the boundary acoustic wave device with desired target frequency characteristics. The manufacturing method for the boundary acoustic wave device includes a process for preparing a laminated body that includes a first medium, a second medium laminated on the first medium, and an IDT electrode that is disposed at an interface between the first and second media, and a process for implanting ions from an outer portion of the second medium and adjusting a frequency.
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