Actinic ray-sensitive or radiation-sensitive composition, resist film using the same, pattern forming method, method for manufacturing electronic device, and electronic device
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United States of America Patent
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Nov 22, 2016
Grant Date -
Oct 8, 2015
app pub date -
Jun 19, 2015
filing date -
Jun 19, 2015
priority date (Note) -
Withdrawn
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Abstract
There is provided an actinic ray-sensitive or radiation-sensitive resin composition containing a resin (P) having a repeating unit represented by the following Formula (A) and having at least two of a repeating unit represented by the following Formula (B), a repeating unit represented by the following Formula (C), a repeating unit represented by the following Formula (D) and a repeating unit represented by the following Formula (E).
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