Bellows leakage tester and methods for testing bellows
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United States of America Patent
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Oct 4, 2016
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N/A
app pub date -
Dec 31, 2013
filing date -
Sep 18, 2013
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Abstract
Various aspects of the present invention provide a testing apparatus and methods for testing a bellows of a sputter machine for air leakage. One such testing apparatus is configured to simulate conditions of the sputter machine and thereby test a bellows for air leakage in both a compressed and an uncompressed configuration. Accordingly, a bellows can be ensured to be in satisfactory working condition before it is installed in the gate valve assembly and also tested for air leakage after removal from the gate valve assembly.
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