Diaphragm piezoresistive pressure sensor
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United States of America Patent
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Oct 4, 2016
Grant Date -
Apr 30, 2015
app pub date -
Oct 22, 2014
filing date -
Oct 24, 2013
priority date (Note) -
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Abstract
A diaphragm piezoresistive pressure sensor includes: a base member; a diaphragm including a middle portion and a surrounding portion surrounding the middle portion; a spacer disposed between and cooperating with the base member and the diaphragm to define a cavity thereamong; an inner abutment member disposed in the cavity and spaced apart from the base member by a clearance; and a piezoresistive sensor unit embedded in the diaphragm. The spacer surrounds and is spaced apart from the inner abutment member. At least one of the inner abutment member and the middle portion of the diaphragm defines a chamber therebetween.
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