Method and apparatus to support process tool modules in a cleanspace fabricator

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United States of America Patent

PATENT NO 9457442
APP PUB NO 20100209226A1
SERIAL NO

12691623

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Abstract

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The present invention provides various aspects of support for a processing tool in a fabrication facility capable of routine placement and replacement of processing tools and component assemblies of the tools. Support aspects include a support structure for component assemblies and a quick disconnect flange which facilitates connecting and disconnect of electrical, liquid and gas utilities to a tool component placed in the processing tool.

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Patent Owner(s)

Patent OwnerAddress
FUTRFAB INC4 CROTTY LANE NEW WINDSOR NY 12553

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Flitsch, Frederick A New Windsor, US 253 4985

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