Scanning probe microscope and scanning probe microscopy
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United States of America Patent
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Sep 27, 2016
Grant Date -
Jan 28, 2016
app pub date -
Oct 2, 2015
filing date -
Apr 5, 2013
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Abstract
A scanning probe microscope includes a vibration unit to vibrate the cantilever on the basis of a vibration signal, a displacement detection unit to output a displacement signal indicating the displacement of the cantilever, a phase adjustment unit to provide a phase offset to a phase difference between the vibration signal and displacement signal, a phase signal generating unit to generate a phase signal including information regarding the phase difference and phase offset, and a control unit to control the distance between the probe and sample on the basis of the phase signal. The phase adjustment unit combines a first phase amount that cancels an initial phase difference exiting in a condition where the probe and sample are out of contact, with a second phase amount equal to or more than (0 [rad]) and less than or equal to (π/2 [rad]) and provides a combined amount to the phase difference.
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