Gyroscope structure and gyroscope
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United States of America Patent
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Sep 27, 2016
Grant Date -
Mar 12, 2015
app pub date -
Sep 9, 2014
filing date -
Sep 11, 2013
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Abstract
A microelectromechanical gyroscope that comprises two seismic masses suspended to form a plane of masses. The seismic masses are excited into rotary oscillation about a common primary axis that is in the plane of masses. Detected angular motion causes a rotary oscillation of the first seismic mass about a first detection axis, and of the second seismic mass about a second detection axis. The detection axes are perpendicular to the plane of masses and separated by a non-zero distance.
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