Robot having high stiffness coupling

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United States of America Patent

PATENT NO 9452527
APP PUB NO 20140137690A1
SERIAL NO

13790156

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Abstract

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A substrate transport arm including a plurality of links rotatably connected to each other in series; and a system for maintaining radial orientation of a third one of the links regardless of a rotational angle of first and second ones of the links relative to each other. The system for maintaining radial orientation includes a four-bar linkage.

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Patent Owner(s)

Patent OwnerAddress
PERSIMMON TECHNOLOGIES CORP200 HARVARD MILL SQUARE WAKEFIELD MA 01880

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hofmeister, Christopher Hampstead, US 132 3216

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