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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CARL ZEISS SMT GMBH	RUDOLF-EBER-STRASSE 2 73447 OBERKOCHEN 73447

International Classification(s)

• G03B:APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS O....
• G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Deguenther, Markus	Aalen, DE	127	1347
Dinger, Udo	Oberkochen, DE	55	998
Gurevich, Igor	Saarbruecken, DE	13	475
Hauf, Markus	Ulm, DE	64	652
Kellner, Stephan	Westhausen, DE	6	24
Wischmeier, Lars	Aalen, DE	5	63

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Mar 20, 2028

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
September 20, 2016	US,9448490,B2   US9448490B2	GRANTED PATENT AS SECOND PUBLICATION
October 10, 2013	US,20130265560,A1   US20130265560A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9448490

EUV lithography system

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