Method and apparatus for providing image data for constructing an image of a region of a target object
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United States of America Patent
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Sep 20, 2016
Grant Date -
Feb 13, 2014
app pub date -
Apr 27, 2012
filing date -
Apr 27, 2011
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Abstract
Embodiments of the present invention provide a method (200) of providing image data for constructing an image of a region of a target object, comprising detecting, by at least one detector (40), at least a portion of radiation scattered by a target object (30) with the incident radiation (10) or an aperture at a predetermined probe position, determining an offset vector (203) for reducing an error associated with the probe position (201), estimating a wavefront (210) based on a probe function having the offset vector applied to the probe position, and providing image data responsive to the detected radiation.
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