MEMS device front-end charge amplifier
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United States of America Patent
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Sep 13, 2016
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Oct 10, 2013
app pub date -
Apr 5, 2013
filing date -
Apr 5, 2012
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Abstract
This document discusses, among other things, apparatus and methods for a front-end charge amplifier. In certain examples, a front-end charge amplifier for a microelectromechanical system (MEMS) device can include a charge amplifier configured to couple to the MEMS device and to provide sense information of a proof mass of the MEMS device, a feedback circuit configured to receive the sense information and to provide feedback to an input of the charge amplifier, and wherein the charge amplifier includes a transfer function having a first pole at a first frequency, a second pole at a second frequency, and one zero at a third frequency.
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