Beam guidance system for the focusing guidance of radiation from a high-power laser light source toward a target and LPP X-ray source comprising a laser light source and such a beam guidance system
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United States of America Patent
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Sep 13, 2016
Grant Date -
Apr 9, 2015
app pub date -
Jun 30, 2014
filing date -
Jan 18, 2012
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Abstract
A beam guidance system serves for the focusing guidance of radiation from a high-power laser light source toward a target. The beam guidance system has at least one mirror as reflective beam guidance component and at least one transmission component which is at least partially transmissive to the radiation as refractive beam guidance component. The arrangement of the at least one mirror and of the at least one transmission component is such that beam-induced changes to the beam guidance properties of the at least one mirror are at least partly compensated for by beam-induced changes to the beam guidance properties of the at least one transmission component. This results in a beam guidance system in which beam-induced changes to the beam guidance properties of the beam guidance system do not have a disturbing effect on the focusing guidance of the radiation from the laser light source.
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