Piezoelectric element and method of producing the same
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United States of America Patent
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Sep 13, 2016
Grant Date -
Feb 5, 2015
app pub date -
Jul 10, 2014
filing date -
Jul 31, 2013
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Abstract
A piezoelectric element includes a substrate having a first surface with a predetermined orientation; a lower electrode layered on the first surface of the substrate; a piezoelectric thin film layered on the lower electrode and having a piezoelectric body; and an upper electrode layered on the piezoelectric thin film. A voltage is to be impressed between the lower electrode and the upper electrode to deform the piezoelectric thin film. The piezoelectric thin film is epitaxially grown on the lower electrode using a physical vapor deposition or a chemical vapor deposition.
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