Apparatus for generating a hollow cathode arc discharge plasma
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United States of America Patent
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Sep 13, 2016
Grant Date -
Dec 4, 2014
app pub date -
Oct 17, 2012
filing date -
Dec 19, 2011
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Abstract
An apparatus for generating a hollow cathode arc discharge plasma, including two plasma sources, each including a hollow cathode and an electrode which is associated with the hollow cathode and which has an opening that extends through the electrode, wherein the hollow cathodes of the two plasma sources are connected to a pulse generator which generates a bipolar, medium-frequency pulsed voltage between the two hollow cathodes. Here, in each of the two plasma sources, the hollow cathode is connected in an electrically conducting manner, directly or with interconnection of at least one current direction limiting component, to the associated electrode.
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